Integration of ZnO nanorods with MOS capacitor for self-powered force sensors and nanogenerators

Abstract In this work, we present a novel force-sensing device with zinc oxide nanorods (ZnO NRs) integrated metal-oxide-semiconductor (MOS) capacitor and encapsulated Kapton tape. The details of the fabrication process working principle ZnO NRs-MOS as force sensor nanogenerator have been discussed. fabricated ZnO-MOS is tested for both open-circuit resistor-connected mode. For an input in range 1–32 N, output voltage measured to be 60–100 mV different configurations. mode, maximum power 0.6 pW obtained 1 MΩ external resistor 8 N. addition, influence seed layers (Ag ZnO) patterning geometry on investigated by experiments. An equivalent circuit model has developed study NRs tape output. This could example integrating piezoelectric nanomaterials traditional electronic devices inspire designs methods nanoscale self-powered sensors nanogenerators.